Specification
| Content | Unit | Guarantee | Result |
|---|---|---|---|
| Purity | Area% | Min 99.995 | ≥ 99.999 |
| ß-Isomer | Area% | Max 0.001 | ≤ 0.001 |
| Moisture | wt% | Max 0.020 | ≤ 0.005 |
| Acidity | wt% | Max 0016 | ≤ 0.005 |
| Metal | ppt | each Max 500 | each ≤ 50 |
| 0.1um Particle | ea/ml | Max 150 | ≤ 15 |
| 0.2um Particle | ea/ml | Max 40 | ≤ 5 |
Application
-
Semiconductor process
(PR, Thinner) -
Surface adherent on
silicon wafers -
Cleaner for PR raw
materials and display,
and etc.
Features
- Representative solvents used in the electronics industry such as semiconductor and display
- Eco-friendly, β-Isomer free product that is harmless to the human body
- Ultra-high purity grade products, applicable to PR and other materials for EUV
- ACQC(Automatic Clean Quick Coupler System)
Packing
-
01
20L Can
-
02
200L Drum
-
03
IBC Container
-
04
ISO Tank Container